The aim of this study is to investigate the potentiality of an HiPIMS reactive process with two gases, evaluating the process control and the properties of the deposited coatings compared to DCMagnetron Sputtering. TiCN(H) nano-composite films have been deposited in a CFUBMS apparatus and HiPIMS generator. Coatings have been characterized from compositional, microstructural as well as mechanical and tribological point of view

Synthesis and characterization of titanium carbon nitride films by High Power Impulse Magnetron Sputtering

Grigoletto, Silvia
2014/2015

Abstract

The aim of this study is to investigate the potentiality of an HiPIMS reactive process with two gases, evaluating the process control and the properties of the deposited coatings compared to DCMagnetron Sputtering. TiCN(H) nano-composite films have been deposited in a CFUBMS apparatus and HiPIMS generator. Coatings have been characterized from compositional, microstructural as well as mechanical and tribological point of view
2014-04
126
HiPMS, reactive sputtering, TiCN, nanocomposite, protective coatings
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.12608/17868